Course detail
Vacuum Physics and Technology
FSI-TTV Acad. year: 2022/2023 Winter semester
The course is devoted to physical processes taking place in vacuum, vacuum measurements, techniques for obtaining vacuum, materials suitable for construction of vacuum systems, and basic components of vacuum systems.
Language of instruction
Czech
Number of ECTS credits
3
Supervisor
Department
Learning outcomes of the course unit
Students acquire abilities to calculate and design simple vacuum apparatus (pump velocity, degassing of chamber walls, selection of materials and seals). Students are also able to localize vacuum leaks by various methods.
Prerequisites
Knowledge of Newtonian mechanics on the level defined by the textbook HALLIDAY, D. – RESNICK, R. – WALKER, J. Fundamentals of Physics. J. Wiley and Sons. Working knowledge of differential, and integral calculus is expected.
Planned learning activities and teaching methods
The course is taught through lectures explaining the basic principles and theory of the discipline. Exercises are focused on practical topics presented in lectures.
Assesment methods and criteria linked to learning outcomes
The exam is divided into written- and oral part.
Aims
The aim is to facilitate students in basic view on vacuum physics to be able to design simple vacuum systems and to operate simple technologic apparatuses using various levels of vacuum for fabrication of thin films.
Specification of controlled education, way of implementation and compensation for absences
The presence at the practices is obligatory. Absence compensation is laid down by the teacher according to the range of the absented matter.
The study programmes with the given course
Programme B-FIN-P: Physical Engineering and Nanotechnology, Bachelor's, compulsory
Type of course unit
Lecture
26 hours, optionally
Teacher / Lecturer
Syllabus
Vacuum. Vacuum definition and classification. History of vacuum techniques. Importance of vacuum technology and applications of vacuum techniques. Books on vacuum technology.
Maxwell distribution of the velocities. Pressure of gas. Mean free path. Law´s of kinetic theory of ideal gases.
Physical processes in vacuum systems.
Effusion, diffusion, transfer of heat and momentum. Flow of gases. Adsorption and desorption. Solubility and permeation of the gases. Evaporation and condensation.
Ionization of the gases. Interactions of electrons and ions with solid surfaces.
Vacuum production. Pumping speed. Pumping of a vacuum system. Rotary and sorption pumps. Diffusion pumps. Turbomolecular pumps. Ion pumps. Cryogenic pumps.
Measurement of low pressures. McLeod gauge, membrane gauges, Pirani gauge, Penning gauges and others ionization gauges.
Quadrupole spectrometer.
High vacuum technology. Components of vacuum apparatus. Materials useful ranges for vacuum. Vacuum valves. Flange fittings. Electrical vacuum feedthroughs. Motion transmission into the vacuum chamber. Vacuum apparatuses. Design of the vacuum complex.
Leak detection. Outgasing of the walls. Rules for operating vacuum systems.
Exercise
10 hours, compulsory
Teacher / Lecturer
Syllabus
The tutorial will be in direct link with the course (solving sample problems of the throughput and pumping speed). Excursion to vacuum laboratory of the Institute of Physical Engineering.
Computer-assisted exercise
3 hours, compulsory
Syllabus
Computer-aided design vacuum apparatus.