Course detail
Selected Topics in Electron Microscopy
FSI-TM0 Acad. year: 2025/2026 Winter semester
The course deals with problems of electron microscopy and related methods. Accented are physical principles, construction and production of electron microscopes.
Language of instruction
Czech
Number of ECTS credits
2
Supervisor
Department
Entry knowledge
Knowledge of electromagnetism on the level defined by the textbook HALLIDAY, D. – RESNICK, R. – WALKER, J.: Fundamentals of Physics. J. Wiley and Sons.
Rules for evaluation and completion of the course
credits, based on final discussion
Participation at lectures
Aims
After succesfull passing the course, the students should be able to:
- describe the construction of various types electron microscopes
- characterise individual physical phenomena yielding the image and discuss the function of the aparatus blocks
- evaluate the utility of different types EM for particular sample measurement.
Knowledge of the principles of construction of electron microscope and functionality of its parts.
The study programmes with the given course
Programme BPC-NCP: Chip Design and Modern Semiconductor Technologies, Bachelor's, compulsory
Programme B-FIN-P: Physical Engineering and Nanotechnology, Bachelor's, elective
Programme N-PMO-P: Precise Mechanics and Optics, Master's, elective
Programme N-FIN-P: Physical Engineering and Nanotechnology, Master's, elective
Type of course unit
Lecture
26 hours, optionally
Syllabus
1. Basics of scanning and transmission electron microscopy
2. Applications of electron microscopy
3. Electron and ion optics
4. Sources of electrons and ions
5. Interaction of electrons and ions with solid state matter
6. Ssignal detection im electron microscopy
7. Vacuum system
8. Sample manipulation inside electron microscope
9. Sample stages
10. Electron microscope as a system
11. Contrast of image 1. (SEM)
12. Contrast of image 2. (TEM)
13. Electron microscope as an analytical lab
14. Mopdern trends in electron microscopy
15. Practical demonstration