Publication detail
Potentialities of optical profilometer MicroProf FRT for surface quality measurement
PÁLENÍKOVÁ, K. OHLÍDAL, M.
Czech title
Možnosti optického profilometru MicroProf FRT při měření kvality povrchu
English title
Potentialities of optical profilometer MicroProf FRT for surface quality measurement
Type
conference paper
Language
en
Original abstract
Principle, parameters and selected applications of the optical profilometer MicroProf FRT are presented.
Czech abstract
Jsou prezentovány princip, parametry a vybrané aplikace optického profilometru MicroProf FRT.
English abstract
Principle, parameters and selected applications of the optical profilometer MicroProf FRT are presented.
Keywords in Czech
Optická metrologie, kvalita povrchu
Keywords in English
Optical metrology, surface quality
RIV year
2005
Released
01.07.2005
Publisher
SPIE - The internationalSociety for Optical Engineering
Location
Bellingham, Washington, USA
ISBN
0-8194-5951-8
ISSN
0277-786X
Book
14 th Slovak-Czech Polish Conference on Wave and Quantum Aspects of Contemporary Optics
Journal
Proceedings of SPIE
Volume
5945
Pages from–to
59451O-1–59451O-6
Pages count
6
BIBTEX
@inproceedings{BUT20933,
author="Kateřina {Brillová} and Miloslav {Ohlídal},
title="Potentialities of optical profilometer MicroProf FRT for surface quality measurement",
journal="Proceedings of SPIE",
booktitle="14 th Slovak-Czech Polish Conference on Wave and Quantum Aspects of Contemporary Optics",
year="2005",
volume="5945",
month="July",
pages="59451O-1--59451O-6",
publisher="SPIE - The internationalSociety for Optical Engineering",
address="Bellingham, Washington, USA",
isbn="0-8194-5951-8",
issn="0277-786X"
}