Publication detail

Noncontact three-dimensional surface profiling using reflected light holographic confocal microscopy

Antošová, I. Harna, Z.

English title

Noncontact three-dimensional surface profiling using reflected light holographic confocal microscopy

Type

conference paper

Language

en

Original abstract

This article deals with an application of the broad-source image plane holography, which offers nonscanning confocal imaging, i.e., real time imaging. We have developed a laboratory version of a holographic confocal microscope (HCM). By the measurement of the axial intensity response for a perfect plane mirror we have verified the confocal imaging capability with the depth discrimination. The noncontact surface profiling possibility was verified by processing series of optical sections with consequent 3D reconstruction of the real surface profile.

English abstract

This article deals with an application of the broad-source image plane holography, which offers nonscanning confocal imaging, i.e., real time imaging. We have developed a laboratory version of a holographic confocal microscope (HCM). By the measurement of the axial intensity response for a perfect plane mirror we have verified the confocal imaging capability with the depth discrimination. The noncontact surface profiling possibility was verified by processing series of optical sections with consequent 3D reconstruction of the real surface profile.

Keywords in English

Noncontact three-dimensional surface profiling

Released

31.12.2002

ISBN

0-8194-4837-0

ISSN

0277-786X

Journal

Proceedings of SPIE

Volume

5036

Pages count

6

BIBTEX


@inproceedings{BUT25170,
  author="Irena {Antošová} and Zdeněk {Harna},
  title="Noncontact three-dimensional surface profiling using reflected light holographic confocal microscopy",
  journal="Proceedings of SPIE",
  year="2002",
  volume="5036",
  month="December",
  isbn="0-8194-4837-0",
  issn="0277-786X"
}