Publication detail
Methods of measurement of capacitive pressure sensors
BEČVÁŘ, D. HUBÁLEK, J. VRBA, R. MUSIL, V.
English title
Methods of measurement of capacitive pressure sensors
Type
conference paper
Language
en
Original abstract
Novel methods of pressure measurement of capacitive sensors are presented. All of them are shown as very suitable for on-chip realisations. The very small capacity measurement, high resolution and auto-calibrated techniques are described in this paper.
English abstract
Novel methods of pressure measurement of capacitive sensors are presented. All of them are shown as very suitable for on-chip realisations. The very small capacity measurement, high resolution and auto-calibrated techniques are described in this paper.
Keywords in English
measurement methods, capacitive sensor, pressure sensor, integrated circuit
RIV year
2001
Released
12.09.2001
Publisher
Ing. Zdeněk Novotný, CSc.
Location
Brno
ISBN
80-214-1960-1
Book
Electronic devices and systems 01 - Proceedings
Edition number
1
Pages count
6
BIBTEX
@inproceedings{BUT2847,
author="Daniel {Bečvář} and Jaromír {Hubálek} and Radimír {Vrba} and Vladislav {Musil},
title="Methods of measurement of capacitive pressure sensors",
booktitle="Electronic devices and systems 01 - Proceedings",
year="2001",
month="September",
publisher="Ing. Zdeněk Novotný, CSc.",
address="Brno",
isbn="80-214-1960-1"
}