Publication detail

Experimental Device for Electron Beam Micromachining

DUPÁK, L. ZOBAČ, M. DUPÁK, J. VLČEK, I.

Czech title

Experimentální zařízení na mikroobrábění elektronovým svazkem

English title

Experimental Device for Electron Beam Micromachining

Type

conference paper

Language

en

Original abstract

The paper describes experimental device for electron beam micromachining as well as some experiments. The device itself is derived from electron beam welding machine SES-1 developed at ISI Brno. Using this device, several types of materials as steel, titanium, quartz glass, ceramics and some plastics were drilled. Typical shape of created holes is cone, which results in very small holes on the opposite side, especially in quartz glass (less than 10 um in diameter, thickness of 0.7 mm).

Czech abstract

Článek popisuje experimentální zařízení na mikroobrábění elektronovým svazkem spolu s několika experimenty. Zařízení je odvozeno ze stolní elektronové svářečky SES-1 vyvinuté na ÚPT v Brně. Pomocí tohoto zařízení byla úspěšně vrtána řada rozdílných materiálů jako nerezová ocel, titan, křemenné sklo, keramika a některé plasty, kdy se povedlo vytvořit velmi malé otvory, obzvláště do křemenného skla (průměr méně než 10 um, tloušťka 0,7 mm).

English abstract

The paper describes experimental device for electron beam micromachining as well as some experiments. The device itself is derived from electron beam welding machine SES-1 developed at ISI Brno. Using this device, several types of materials as steel, titanium, quartz glass, ceramics and some plastics were drilled. Typical shape of created holes is cone, which results in very small holes on the opposite side, especially in quartz glass (less than 10 um in diameter, thickness of 0.7 mm).

Keywords in English

quartz glass drilling

Released

01.01.2006

ISSN

0861-4717

Journal

Elektrotechnica & Elektronica

Volume

41

Number

5-6

Pages from–to

272–275

BIBTEX


@inproceedings{BUT34459,
  author="Libor {Dupák} and Martin {Zobač} and Jan {Dupák} and Ivan {Vlček},
  title="Experimental Device for Electron Beam Micromachining",
  journal="Elektrotechnica & Elektronica",
  year="2006",
  volume="41",
  number="5-6",
  month="January",
  pages="272--275",
  issn="0861-4717"
}