Publication detail
Emission Spectroscopy of Special Types of Discharge
BRABLEC, A. AUBRECHT, V. KAPIČKA, V.
English title
Emission Spectroscopy of Special Types of Discharge
Type
conference paper
Language
en
Original abstract
Special properties of RF discharges offr many hopeful technological applications like deposition thin films, restoration of artefacts, cleaning etc. The parameters of the plasma were investigated by spectral and optical methods. The different temperatures of N2 and OH in the plasma investigated earlier indicate, that even at the atmospheric pressure such plasma are not in the thermodynamic equilibrium.
English abstract
Special properties of RF discharges offr many hopeful technological applications like deposition thin films, restoration of artefacts, cleaning etc. The parameters of the plasma were investigated by spectral and optical methods. The different temperatures of N2 and OH in the plasma investigated earlier indicate, that even at the atmospheric pressure such plasma are not in the thermodynamic equilibrium.
Keywords in English
Emission Spectroscopy, Plasma, Discharge
RIV year
2002
Released
10.09.2001
Publisher
UVEE FEI
Location
Brno
ISBN
80-214-1600-9
Book
Proceedings of XIVth Symposium on Physics of Switching Arc
Pages count
6
BIBTEX
@inproceedings{BUT3534,
author="Antonín {Brablec} and Vladimír {Aubrecht} and Vratislav {Kapička},
title="Emission Spectroscopy of Special Types of Discharge",
booktitle="Proceedings of XIVth Symposium on Physics of Switching Arc",
year="2001",
month="September",
publisher="UVEE FEI",
address="Brno",
isbn="80-214-1600-9"
}