Publication detail
Means of Pressure Analysis using Nitride Silicon Diaphragm
MATĚJKA, F. MATĚJKOVÁ, J. VRBA, R. BENEŠ, P.
English title
Means of Pressure Analysis using Nitride Silicon Diaphragm
Type
conference paper
Language
en
Original abstract
Means of Pressure Analysis using Nitride Silicon Diaphragm
English abstract
Means of Pressure Analysis using Nitride Silicon Diaphragm
Keywords in English
Pressure Analysis Nitride Silicon Diaphragm
RIV year
2002
Released
15.09.2001
Publisher
WSES Press
Location
Brazil
ISBN
960-8052-39-4
Book
Mastorakis, N. – Pecorelli-Peres, I. A. (editors): Advances in Systems Science: Measurement, Circuits and Control. Electrical and Computer Engineering Series – A Series of Reference Books and Textbooks, Brazil, WSES Press 2001
Edition number
1
Pages count
4
BIBTEX
@inproceedings{BUT3991,
author="František {Matějka} and Jiřina {Matějková} and Radimír {Vrba} and Petr {Beneš},
title="Means of Pressure Analysis using Nitride Silicon Diaphragm",
booktitle="Mastorakis, N. – Pecorelli-Peres, I. A. (editors): Advances in Systems Science: Measurement, Circuits and Control. Electrical and Computer Engineering Series – A Series of Reference Books and Textbooks, Brazil, WSES Press 2001",
year="2001",
month="September",
publisher="WSES Press",
address="Brazil",
isbn="960-8052-39-4"
}