Publication detail

Deposition and in-situ charakterization of ultra-thin films

VOBORNÝ, S. KOLÍBAL, M. MACH, J. ČECHAL, J. BÁBOR, P. PRŮŠA, S. SPOUSTA, J. ŠIKOLA, T.

Czech title

Depozice a in-situ charakterizace ultratenkých vrstev

English title

Deposition and in-situ charakterization of ultra-thin films

Type

journal article - other

Language

en

Original abstract

Paper deals with the deposition and in-situ charakterization of ultra-thin films

Czech abstract

Článek se zabývá depozicí a in-situ charakterizace ultratenkých vrstev

English abstract

Paper deals with the deposition and in-situ charakterization of ultra-thin films

Keywords in Czech

Iontový svazek, depozice, XPS

Keywords in English

Ion beam, deposition, XPS

RIV year

2004

Released

01.01.2004

ISSN

0040-6090

Journal

Thin Solid Films

Volume

459

Number

1-2

Pages count

5

BIBTEX


@article{BUT42360,
  author="Stanislav {Voborný} and Miroslav {Kolíbal} and Jindřich {Mach} and Jan {Čechal} and Petr {Bábor} and Stanislav {Průša} and Jiří {Spousta} and Tomáš {Šikola},
  title="Deposition and in-situ charakterization of ultra-thin films",
  journal="Thin Solid Films",
  year="2004",
  volume="459",
  number="1-2",
  month="January",
  issn="0040-6090"
}