Publication detail

In situ Analysis of Ga-ultra Thin Films by ToF-LEIS

KOLÍBAL, M. PRŮŠA, S. PLOJHAR, M. BÁBOR, P. POTOČEK, M. TOMANEC, O. KOSTELNÍK, P. MARKIN, S. BAUER, P. ŠIKOLA, T.

Czech title

In-situ analýza ultratenkých vrstev Ga užitím ToF-LEIS

English title

In situ Analysis of Ga-ultra Thin Films by ToF-LEIS

Type

journal article - other

Language

en

Original abstract

In the paper the ability of TOF-LEIS to monitor the growth of ultrathin Ga layers in situ is presented. The FWHM of the Ga peaks in the TOF-LEIS spectra showed a linear dependence on Ga coverage. The analysis of the Ga growth on two Si(111) substrates cleaned in two distinct ways (chemical etching and UHV thermal flashing) revealed changes in the Si peak evolution caused by different growth modes taking place on these two substrates. This has been proved by ex situ AFM measurements as well.

Czech abstract

In-situ analýza ultratenkých vrstev Ga užitím ToF-LEIS

English abstract

In the paper the ability of TOF-LEIS to monitor the growth of ultrathin Ga layers in situ is presented. The FWHM of the Ga peaks in the TOF-LEIS spectra showed a linear dependence on Ga coverage. The analysis of the Ga growth on two Si(111) substrates cleaned in two distinct ways (chemical etching and UHV thermal flashing) revealed changes in the Si peak evolution caused by different growth modes taking place on these two substrates. This has been proved by ex situ AFM measurements as well.

Keywords in English

low energy ion scattering; AFM; growth; gallium; silicon

RIV year

2006

Released

01.08.2006

Publisher

Elsevier

ISSN

0168-583X

Journal

Nuclear Instruments and Methods in Physics Research B

Volume

249

Number

1-2

Pages from–to

318–321

Pages count

4

BIBTEX


@article{BUT43514,
  author="Miroslav {Kolíbal} and Stanislav {Průša} and Martin {Plojhar} and Petr {Bábor} and Michal {Potoček} and Ondřej {Tomanec} and Petr {Kostelník} and S. N. {Markin} and P. {Bauer} and Tomáš {Šikola},
  title="In situ Analysis of Ga-ultra Thin Films by ToF-LEIS",
  journal="Nuclear Instruments and Methods in Physics Research B",
  year="2006",
  volume="249",
  number="1-2",
  month="August",
  pages="318--321",
  publisher="Elsevier",
  issn="0168-583X"
}