Publication detail

Efficiency of Collection of the Secondary Electrons in SEM

KONVALINA, I. MÜLLEROVÁ I.

Czech title

Účinnost sběru sekundárních elektronů v REM.

English title

Efficiency of Collection of the Secondary Electrons in SEM

Type

journal article - other

Language

en

Original abstract

Great effort has been invested into upgrading the image resolution in SEM up to some 1 nm at 15 keV. However, uncertainty still exists as regards proper appearance of even standard testing specimens. The same energy, current and impact angle of the primary beam and the same type of the secondary electron (SE) detector do not secure identical image contrast. Many details regarding generation, collection and detection of the signal species are important and a quantitative method of the detector assessment is needed. Magnetic and electrostatic fields in the specimen vicinity surely influence the SE trajectories toward detector and these fields vary with the working distance, with arrangement of grounded metallic parts in the specimen chamber, etc. The recently opened systematic study of this problem was started by examination of the collection efficiency.

English abstract

Great effort has been invested into upgrading the image resolution in SEM up to some 1 nm at 15 keV. However, uncertainty still exists as regards proper appearance of even standard testing specimens. The same energy, current and impact angle of the primary beam and the same type of the secondary electron (SE) detector do not secure identical image contrast. Many details regarding generation, collection and detection of the signal species are important and a quantitative method of the detector assessment is needed. Magnetic and electrostatic fields in the specimen vicinity surely influence the SE trajectories toward detector and these fields vary with the working distance, with arrangement of grounded metallic parts in the specimen chamber, etc. The recently opened systematic study of this problem was started by examination of the collection efficiency.

Keywords in English

collection efficiency, secondary electrons, scanning electron microscope

Released

07.09.2003

Location

Dresden

ISSN

1431-9276

Book

Microscopy and Microanalysis

Journal

MICROSCOPY AND MICROANALYSIS

Volume

9

Number

3

Pages count

2

BIBTEX


@article{BUT44394,
  author="Ivo {Konvalina} and Ilona {Müllerová},
  title="Efficiency of Collection of the Secondary Electrons in SEM",
  journal="MICROSCOPY AND MICROANALYSIS",
  booktitle="Microscopy and Microanalysis",
  year="2003",
  volume="9",
  number="3",
  month="September",
  address="Dresden",
  issn="1431-9276"
}