Publication detail

Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation

BARTOŠÍK, M. KOLÍBAL, M. ČECHAL, J. MACH, J. ŠIKOLA, T.

Czech title

Selektivní růst kovových nanostruktur na površích se vzory vytvořenými lokální anodickou oxidací

English title

Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation

Type

journal article - other

Language

en

Original abstract

We report on an alternative approach for the fabrication of metallic nanostructures: a selective growth on silicon substrates patterned by local anodic oxidation using atomic force microscopy. Our method represents a maskless, four-step process which combines a top-down and bottom-up approach. The dimensions of both the oxide lines and metallic elements can be controlled during the technological process. In this paper we demonstrate the preparation of gallium and cobalt structures on silicon substrates but this method can be extended to other combinations of metals and substrates enabling thus the fabrication of ordered nanostructures of various compositions and properties on locally oxidized surfaces.

Czech abstract

Článek popisuje alternativní přístupe přípravy kovových nanostruktur: selektivní růst na substrátech modifikovaných pomocí lokální anodické oxidace.

English abstract

We report on an alternative approach for the fabrication of metallic nanostructures: a selective growth on silicon substrates patterned by local anodic oxidation using atomic force microscopy. Our method represents a maskless, four-step process which combines a top-down and bottom-up approach. The dimensions of both the oxide lines and metallic elements can be controlled during the technological process. In this paper we demonstrate the preparation of gallium and cobalt structures on silicon substrates but this method can be extended to other combinations of metals and substrates enabling thus the fabrication of ordered nanostructures of various compositions and properties on locally oxidized surfaces.

Keywords in Czech

Selektivní růstů Lokální anodická oxidace; Gallium; Litografie

Keywords in English

Selective growth; Local anodic oxidation; Gallium; Patterning

RIV year

2009

Released

01.10.2009

ISSN

1533-4880

Journal

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Volume

9

Number

10

Pages from–to

5887–5890

Pages count

4

BIBTEX


@article{BUT48787,
  author="Miroslav {Bartošík} and Miroslav {Kolíbal} and Jan {Čechal} and Jindřich {Mach} and Tomáš {Šikola},
  title="Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation",
  journal="JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY",
  year="2009",
  volume="9",
  number="10",
  month="October",
  pages="5887--5890",
  issn="1533-4880"
}