Patent detail
Multilayer gettering structure for semiconductor device and method
LYSÁČEK, D. LORENC, M. VÁLEK, L.
English title
Multilayer gettering structure for semiconductor device and method
Patent type
Patent
English abstract
Multilayer gettering structure for semiconductor device and method
Date of registration
03.07.2006
Patent number
US Patent 7,737,004 B2
Patent owner
ON Semiconductor