Czech

prof. RNDr. Miloslav Ohlídal, CSc.

Institute of Physical Engineering

As part of the introduction to the study of the subject, students will be introduced to the following concepts with the extent necessary to master the subject.

• The description of a random rough surface (Random functions, Spectral power density of a random function, Continuous and Discrete Fourier transform).
• Principles of the theory of diffraction, which is the starting point for the aforementioned theories of electromagnetic irradiation.
• Basics of thin film optics with an emphasis on films with defects.

The partial examination of doctoral studies.

Oral exam, arbitrary literature is allowed.

Due to a request from the optical industry, the topic was narrowed to surfaces generated for industrial optical applications. The quality of these surfaces is determined primarily by their shape, roughness, and coating with appropriate thin films. Therefore, students will become familiar with the basis of optical profilometry, the use of the electromagnetic radiation scattering from the surfaces mentioned, and the determination of optical parameters of thin films.

Students will become familiar with

1. Principles of operation of the most used optical profilometers and limitations of their usage in the given task. They will test their knowledge by means of measurements using the optical profilometer MicroProf FRT within non-standard tasks (e.g., the measurement of residual internal stress within thin films).
2. The use of Beckmann-Kirchhoff theory and Rayleigh-Rice theory for the roughness of determination of the given solid surfaces. They will test their knowledge by means of measurements using the SMIII scatterometer built in our laboratory.
3. The non-standard technique of imaging spectroscopic reflectometry, which is intended for optical characterization non-uniform thin films. They will test their knowledge by means of measurements using the imaging spectroscopic reflectometers built in our laboratory.

Programme D-FIN-P: Physical Engineering and Nanotechnology, Doctoral, recommended course

20 hours, optionally

1. Character of the rough surface and its description


2. Classical optical methods of surface quality measurement (brief overview)


3. Modern optical methods of surface quality measurement (brief overview)


4. Optical profilometry for surfaces generated for industrial optical applications.


5. Formulation of the Beckman-Kirchhoff theory of scattering of electromagnetic waves from surfaces generated for optical applications.


6. Formulation of the Rayleigh-Rice theory of scattering of electromagnetic waves from generated surfaces for optical applications.


7. Fundamentals of thin film optics with an emphasis on thin films with defects


8. Contribution of the Coherence Optics Laboratory of the IFE FME BUT to the issue of the subject