Publication detail
Calculation of the performance of magnetic lenses with limited machining precision
SHÁNĚL, O. ZLÁMAL, J. ORAL, M.
Czech title
Výpočet zobrazovacích vlastností magnetických čoček v tolerančním rozsahu mechnické přesnosti obrábění
English title
Calculation of the performance of magnetic lenses with limited machining precision
Type
journal article in Web of Science
Language
en
Original abstract
To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.
Czech abstract
Aby bylo dosaženo požadovaného rozlišení v STEM je třeba určit přesnost výroby pólových nástavců magnetických čoček. Toto je uděláno v modulu toleracnce v programu EOD.
English abstract
To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.
Keywords in Czech
Toleranční analýza; Gemoetrické nepřesnosti; Velikost stopy; Vady zobrazení; Saturovaná magnetická čočka.
Keywords in English
Tolerance analysis; Perturbed geometry; Spot size; Aberrations; Saturated magnetic lens
RIV year
2014
Released
01.02.2014
ISSN
0304-3991
Volume
137
Number
1
Pages from–to
1–6
Pages count
6
BIBTEX
@article{BUT103136,
author="Ondřej {Sháněl} and Jakub {Zlámal} and Martin {Oral},
title="Calculation of the performance of magnetic lenses with limited machining precision",
year="2014",
volume="137",
number="1",
month="February",
pages="1--6",
issn="0304-3991"
}