Publication detail
Instrument for Thin Films Diagnostics by UV Spectroscopic Reflectometry
URBÁNEK, M. SPOUSTA, J. NAVRÁTIL, K. FIEDOR, M. CHMELÍK, R. BUČEK, M. ŠIKOLA, T.
Czech title
Instrument pro Diagnostiku Tenkých vrstev pomocí UV Spektroskopiské reflektometrie.
English title
Instrument for Thin Films Diagnostics by UV Spectroscopic Reflectometry
Type
conference paper
Language
en
Original abstract
A system for large area thin film homognity diagnostics by spectroscopic reflectometry.
Czech abstract
Systém pro plošné monitorovámí homegenity růstu tenkých vrstev pomocí spektroskopické elipsmetrie.
English abstract
A system for large area thin film homognity diagnostics by spectroscopic reflectometry.
Keywords in English
Thin Films, Reflectometry, Interferometry
RIV year
2003
Released
06.10.2003
Publisher
ECASIA
Location
Berlin
Book
ECASIA '03 Book of abstracts
Pages count
1
BIBTEX
@inproceedings{BUT11095,
author="Michal {Urbánek} and Jiří {Spousta} and Karel {Navrátil} and Marián {Fiedor} and Radim {Chmelík} and Miroslav {Buček} and Tomáš {Šikola},
title="Instrument for Thin Films Diagnostics by UV Spectroscopic Reflectometry",
booktitle="ECASIA '03 Book of abstracts",
year="2003",
month="October",
publisher="ECASIA",
address="Berlin"
}