Publication detail

In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS

ČECHAL, J. TICHOPÁDEK, P. NEBOJSA, A. BONAVENTUROVÁ - ZRZAVECKÁ, O. URBÁNEK, M. NAVRÁTIL, K. ŠIKOLA, T.

Czech title

In-situ analýza PMPSi pomocí spektroskopické elipsometrie a XPS.

English title

In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS

Type

conference paper

Language

en

Original abstract

Degradation of PMPSi under temperature and UV light uder UHV conditions studied by XPS and spectroscopic ellipsometry.

Czech abstract

Studium degradace PMPSi vlivem teploty a UV záření je studována pomocí XPS a spektroskopické elipsometrie.

English abstract

Degradation of PMPSi under temperature and UV light uder UHV conditions studied by XPS and spectroscopic ellipsometry.

Keywords in English

XPS, PMPSi, spectroscopic ellipsometry

RIV year

2003

Released

06.10.2003

Publisher

ECASIA

Location

Berlin

Book

ECASIA 10 Book of Abstracts

Pages count

1

BIBTEX


@inproceedings{BUT11096,
  author="Jan {Čechal} and Petr {Tichopádek} and Alois {Nebojsa} and Olga {Bonaventurová - Zrzavecká} and Michal {Urbánek} and Karel {Navrátil} and Tomáš {Šikola},
  title="In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS",
  booktitle="ECASIA 10 Book of Abstracts",
  year="2003",
  month="October",
  publisher="ECASIA",
  address="Berlin"
}