Publication detail

On the Calculation of SEM and FIB Beam Profiles

KOLOŠOVÁ, J. HRNČÍŘ, T. JIRUŠE, J. RUDOLF, M. ZLÁMAL, J.

Czech title

Výpočet profilů svazku v SEM a FIB

English title

On the Calculation of SEM and FIB Beam Profiles

Type

journal article in Scopus

Language

en

Original abstract

In this paper we describe the results of calculations, based on detailed manufacturer’s knowledge of the instrument optical system. This is compared to experimentally measured resolution and the correlation of these data is discussed.

Czech abstract

V tomto článku jsou diskutovány výsledky výpočtů rozlišení založené na detailní znalosti optického systému elektronových mikroskopů a porovnány s experimentálními daty.

English abstract

In this paper we describe the results of calculations, based on detailed manufacturer’s knowledge of the instrument optical system. This is compared to experimentally measured resolution and the correlation of these data is discussed.

Keywords in Czech

Elektronová optika; Výpočty; EOD

Keywords in English

Electron optics; Calculations; EOD

RIV year

2015

Released

30.06.2015

ISSN

1431-9276

Volume

21

Number

S4

Pages from–to

206–211

Pages count

6

BIBTEX


@article{BUT119197,
  author="Jolana {Kološová} and Tomáš {Hrnčíř} and Jaroslav {Jiruše} and Miroslav {Rudolf} and Jakub {Zlámal},
  title="On the Calculation of SEM and FIB Beam Profiles",
  year="2015",
  volume="21",
  number="S4",
  month="June",
  pages="206--211",
  issn="1431-9276"
}