Publication detail

Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

VODÁK, J. NEČAS, D. OHLÍDAL, M. OHLÍDAL, I.

English title

Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

Type

journal article in Web of Science

Language

en

Original abstract

In this paper an imaging spectroscopic reflectometer with enhanced spatial resolution is presented. Main features of its design, experimental data acquisition, i.e. maps of thin film spectral dependencies of local reflectance and the local thickness map determination are described. The ability of this instrument to characterize thin film thickness non-uniformity with high gradients is demonstrated on measurements of thin film edges. A comparison with an older device is also presented.

English abstract

In this paper an imaging spectroscopic reflectometer with enhanced spatial resolution is presented. Main features of its design, experimental data acquisition, i.e. maps of thin film spectral dependencies of local reflectance and the local thickness map determination are described. The ability of this instrument to characterize thin film thickness non-uniformity with high gradients is demonstrated on measurements of thin film edges. A comparison with an older device is also presented.

Keywords in English

enhanced spatial resolution, high gradient thickness distribution, imaging spectroscopic reflectometer, non-uniform thin films

Released

12.01.2017

Publisher

IOP Publishing

ISSN

0957-0233

Volume

28

Number

2

Pages from–to

025205–025205-6

Pages count

6

BIBTEX


@article{BUT131831,
  author="Jiří {Vodák} and David {Nečas} and Miloslav {Ohlídal} and Ivan {Ohlídal},
  title="Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution",
  year="2017",
  volume="28",
  number="2",
  month="January",
  pages="025205--025205-6",
  publisher="IOP Publishing",
  issn="0957-0233"
}