Detail publikace

Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

VODÁK, J. NEČAS, D. OHLÍDAL, M. OHLÍDAL, I.

Anglický název

Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

en

Originální abstrakt

In this paper an imaging spectroscopic reflectometer with enhanced spatial resolution is presented. Main features of its design, experimental data acquisition, i.e. maps of thin film spectral dependencies of local reflectance and the local thickness map determination are described. The ability of this instrument to characterize thin film thickness non-uniformity with high gradients is demonstrated on measurements of thin film edges. A comparison with an older device is also presented.

Anglický abstrakt

In this paper an imaging spectroscopic reflectometer with enhanced spatial resolution is presented. Main features of its design, experimental data acquisition, i.e. maps of thin film spectral dependencies of local reflectance and the local thickness map determination are described. The ability of this instrument to characterize thin film thickness non-uniformity with high gradients is demonstrated on measurements of thin film edges. A comparison with an older device is also presented.

Klíčová slova anglicky

enhanced spatial resolution, high gradient thickness distribution, imaging spectroscopic reflectometer, non-uniform thin films

Vydáno

12.01.2017

Nakladatel

IOP Publishing

ISSN

0957-0233

Ročník

28

Číslo

2

Strany od–do

025205–025205-6

Počet stran

6

BIBTEX


@article{BUT131831,
  author="Jiří {Vodák} and David {Nečas} and Miloslav {Ohlídal} and Ivan {Ohlídal},
  title="Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution",
  year="2017",
  volume="28",
  number="2",
  month="January",
  pages="025205--025205-6",
  publisher="IOP Publishing",
  issn="0957-0233"
}