Publication detail

Flexible foils formed by a prolonged electron beam irradiation in scanning electron microscope

ČECHAL, J. ŠIKOLA, T.

Czech title

Flexibilní fólie vytvořené ozařováním vzorku elektonovým svazkem rastrovacího elektronového mikroskopu

English title

Flexible foils formed by a prolonged electron beam irradiation in scanning electron microscope

Type

journal article in Web of Science

Language

en

Original abstract

The ubiquitous presence of hydrocarbon contamination on solid surfaces alters their inherent physical properties and complicates the surface analyses. An irradiation of sample surface with electron beam can lead to the chemical transformation of the hydrocarbon layer to carbon films, which are flexible and capable of acting as a barrier for chemical etching of an underlying material. The growth of these foils is limited by supply of hydrocarbons to the writing beam position rather than the electron dose or electron beam current. The prepared films can find their applications in fabrication of surface nanostructures without a need of an electron sensitive resist material.

Czech abstract

Ozáření vzorku elektronový svazkem vede k chemické transformaci vrstvy uhlovodíků na uhlíkové filmy. Tyto jsou flexibilní a mohou být využity jako bariéra pro selktivní chemické leptání SiO2.

English abstract

The ubiquitous presence of hydrocarbon contamination on solid surfaces alters their inherent physical properties and complicates the surface analyses. An irradiation of sample surface with electron beam can lead to the chemical transformation of the hydrocarbon layer to carbon films, which are flexible and capable of acting as a barrier for chemical etching of an underlying material. The growth of these foils is limited by supply of hydrocarbons to the writing beam position rather than the electron dose or electron beam current. The prepared films can find their applications in fabrication of surface nanostructures without a need of an electron sensitive resist material.

Keywords in Czech

Uhlíková kontaminace; Uhlovodíky; Ozařování elektronovým svazkem; Vákuum; SiO2; Povrchové procesy

Keywords in English

Adventitious carbon; Hydrocarbon contamination; Electron beam irradiation; Vacuum; Silicon dioxide, SiO2; Surface processes

Released

24.06.2017

ISSN

0169-4332

Volume

423

Number

1

Pages from–to

538–541

Pages count

4

BIBTEX


@article{BUT137792,
  author="Jan {Čechal} and Tomáš {Šikola},
  title="Flexible foils formed by a prolonged electron beam irradiation in scanning electron microscope",
  year="2017",
  volume="423",
  number="1",
  month="June",
  pages="538--541",
  issn="0169-4332"
}