Publication detail

Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

OHLÍDAL, I. OHLÍDAL, M. KLAPETEK, P. ČUDEK, V. JÁKL, M.

Czech title

Charakterizace tenkých vrstev neuniformních v optických parametrech pomocí spektroskopické digitální reflektometrie

English title

Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

Type

conference paper

Language

en

Original abstract

For applying this method the special experimental arrangement containing CCD camera as a detector is used. The spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large area of the substrates of the nonuniform films are found.

Czech abstract

Při aplikaci této metody je použita speciální experimetální sestava se CCD kamerou jako detektorem. Jsou získány spektrální závislosti lokálních odrazivostí. Zpracováním těchto experientálních dat jsou nalezena rozdělení hodnot lokální tloušťky a lokálního indexu lomu na velké ploše neuniformních vrstev na podložce.

English abstract

For applying this method the special experimental arrangement containing CCD camera as a detector is used. The spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large area of the substrates of the nonuniform films are found.

Keywords in English

Films nonuniform in optical parameters, optical characterization

RIV year

2003

Released

01.09.2003

Publisher

SPIE-The International Society for Optical Engineering

Location

Bellingham, Washington, USA

ISBN

0-8194-5055-3

ISSN

0277-786X

Book

Proceedings of SPIE

Volume

Vol 5182

Edition number

Vol 5182

Pages from–to

260–271

Pages count

12

BIBTEX


@inproceedings{BUT14081,
  author="Ivan {Ohlídal} and Miloslav {Ohlídal} and Petr {Klapetek} and Vladimír {Čudek} and Miloš {Jákl},
  title="Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry",
  booktitle="Proceedings of SPIE",
  year="2003",
  volume="Vol 5182",
  month="September",
  pages="260--271",
  publisher="SPIE-The International Society for Optical Engineering",
  address="Bellingham, Washington, USA",
  isbn="0-8194-5055-3",
  issn="0277-786X"
}