Publication detail
Optical Characterization Of Thin Films by Means of Imaging Spectroscopic Reflectometry
OHLÍDAL, M. VODÁK, J. NEČAS, D.
English title
Optical Characterization Of Thin Films by Means of Imaging Spectroscopic Reflectometry
Type
book chapter
Language
en
Original abstract
Non-microscopic imaging spectroscopic reflectometry for optical characterization of thin films is described. This technique is primarily intended for characterization of thin films with area non-uniformity in their optical properties. The characterization can be carried out along a relatively large area of the measured films. The motivation for the development and exploitation of this technique is also discussed. The essential features and the implementation of the technique are provided together with the basic experimental set up of imaging spectroscopic reflectometers. The way of acquiring the experimental data is described. The experimental data processing methods are classified from the point of view of the way in which information contained in the image of the film measured is exploited. Furthermore, specific examples of results measured by imaging spectroscopic reflectometry in the field of thin film optics are introduced. At the end, potential applications of imaging spectroscopic reflectometry in other tasks are also briefly mentioned.
English abstract
Non-microscopic imaging spectroscopic reflectometry for optical characterization of thin films is described. This technique is primarily intended for characterization of thin films with area non-uniformity in their optical properties. The characterization can be carried out along a relatively large area of the measured films. The motivation for the development and exploitation of this technique is also discussed. The essential features and the implementation of the technique are provided together with the basic experimental set up of imaging spectroscopic reflectometers. The way of acquiring the experimental data is described. The experimental data processing methods are classified from the point of view of the way in which information contained in the image of the film measured is exploited. Furthermore, specific examples of results measured by imaging spectroscopic reflectometry in the field of thin film optics are introduced. At the end, potential applications of imaging spectroscopic reflectometry in other tasks are also briefly mentioned.
Keywords in English
imaging spectroscopic reflectometry, non-uniform thin films
Released
16.04.2018
Publisher
Springer International Publishing AG Part of Springer Nature
Location
Cham, Switzerland
ISBN
978-3-319-75324-9
Book
Optical Characterization of Thin Solid Films
Pages from–to
107–141
Pages count
34
BIBTEX
@inbook{BUT155268,
author="Miloslav {Ohlídal} and Jiří {Vodák} and David {Nečas},
title="Optical Characterization Of Thin Films by Means of Imaging Spectroscopic Reflectometry",
booktitle="Optical Characterization of Thin Solid Films",
year="2018",
month="April",
pages="107--141",
publisher="Springer International Publishing AG Part of Springer Nature",
address="Cham, Switzerland",
isbn="978-3-319-75324-9"
}