Optical Characterization Of Thin Films by Means of Imaging Spectroscopic Reflectometry

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Non-microscopic imaging spectroscopic reflectometry for optical characterization of thin films is described. This technique is primarily intended for characterization of thin films with area non-uniformity in their optical properties. The characterization can be carried out along a relatively large area of the measured films. The motivation for the development and exploitation of this technique is also discussed. The essential features and the implementation of the technique are provided together with the basic experimental set up of imaging spectroscopic reflectometers. The way of acquiring the experimental data is described. The experimental data processing methods are classified from the point of view of the way in which information contained in the image of the film measured is exploited. Furthermore, specific examples of results measured by imaging spectroscopic reflectometry in the field of thin film optics are introduced. At the end, potential applications of imaging spectroscopic reflectometry in other tasks are also briefly mentioned.

Non-microscopic imaging spectroscopic reflectometry for optical characterization of thin films is described. This technique is primarily intended for characterization of thin films with area non-uniformity in their optical properties. The characterization can be carried out along a relatively large area of the measured films. The motivation for the development and exploitation of this technique is also discussed. The essential features and the implementation of the technique are provided together with the basic experimental set up of imaging spectroscopic reflectometers. The way of acquiring the experimental data is described. The experimental data processing methods are classified from the point of view of the way in which information contained in the image of the film measured is exploited. Furthermore, specific examples of results measured by imaging spectroscopic reflectometry in the field of thin film optics are introduced. At the end, potential applications of imaging spectroscopic reflectometry in other tasks are also briefly mentioned.

imaging spectroscopic reflectometry, non-uniform thin films

16.04.2018

Springer International Publishing AG Part of Springer Nature

Cham, Switzerland

978-3-319-75324-9

Optical Characterization of Thin Solid Films

107–141

34