Publication detail
Electron Beam Micromachining
DUPÁK, L. ZOBAČ, M.
Czech title
Mikroobrábění elektronovým svazkem
English title
Electron Beam Micromachining
Type
conference paper
Language
en
Original abstract
The paper describes shows some results of electron beam micromachining done. The used device is derived from electron beam welding machine SES-1 developed at ISI Brno. Several types of materials as stainless steel, titanium, quartz glass, ceramics and some plastics were drilled. Typical shape of created holes is cone, which results in very small holes on the opposite side, especially in quartz glass (less than 10 microns in diameter, thickness of 0.7 mm).
Czech abstract
Článek popisuje experimentální zařízení na mikroobrábění elektronovým svazkem spolu s několika experimenty. Zařízení je odvozeno ze stolní elektronové svářečky SES-1 vyvinuté na ÚPT v Brně. Pomocí tohoto zařízení byla úspěšně vrtána řada rozdílných materiálů jako nerezová ocel, titan, křemenné sklo, keramika a některé plasty.
English abstract
The paper describes shows some results of electron beam micromachining done. The used device is derived from electron beam welding machine SES-1 developed at ISI Brno. Several types of materials as stainless steel, titanium, quartz glass, ceramics and some plastics were drilled. Typical shape of created holes is cone, which results in very small holes on the opposite side, especially in quartz glass (less than 10 microns in diameter, thickness of 0.7 mm).
Keywords in Czech
vrtání elektronovým svazkem, křemenné sklo
Keywords in English
electron beam drilling; quartz glass
Released
22.05.2006
Publisher
Institute of Scientific Instruments AS CR and the Czechoslovak Microscopy Society
Location
Brno
ISBN
80-239-6285-X
Book
Proceedings of 10th seminar Recent Trends in Charged Particle Optics and Surface Physics Instruments
Edition number
NEUV
Pages count
2
BIBTEX
@inproceedings{BUT21748,
author="Libor {Dupák} and Martin {Zobač},
title="Electron Beam Micromachining",
booktitle="Proceedings of 10th seminar Recent Trends in Charged Particle Optics and Surface Physics Instruments",
year="2006",
month="May",
publisher="Institute of Scientific Instruments AS CR and the Czechoslovak Microscopy Society",
address="Brno",
isbn="80-239-6285-X"
}