Publication detail

PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. NEČAS, D.

Czech title

Přesné měření rozdělení tloušťky neuniformních tenkých vrstev zobrazovací spektroskopickou reflektometrií

English title

PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY

Type

conference paper

Language

en

Original abstract

A new method of imaging spectroscopic photometry enabling us to perform the complete optical characterization of thin films exhibiting area non-uniformity in optical parameters is presented. An original imaging spectroscopic photometer operating in the reflection mode at normal incidence is used to apply this method. The method described was used to characterize carbon-nitride thin films.

Czech abstract

Je presentována nová metoda zobrazovací spektroskopické fotometrie umožňující úplně charakterizovat tenké vrstvy vykazující plošnou neuniformitu v optických parametrech. K realizaci této metody byl použit původní zobrazovací spektroskopický fotometr pracující v reflexním módu. Metoda byla použita pro charakterizaci karbon-nitridových tenkých vrstev.

English abstract

A new method of imaging spectroscopic photometry enabling us to perform the complete optical characterization of thin films exhibiting area non-uniformity in optical parameters is presented. An original imaging spectroscopic photometer operating in the reflection mode at normal incidence is used to apply this method. The method described was used to characterize carbon-nitride thin films.

Keywords in Czech

neuniformní tenké vrstvy, zobrazovací spektroskopická reflektometrie

Keywords in English

non-uniform thin films, imaging spectroscopic reflectometry

RIV year

2009

Released

11.09.2009

Publisher

IMEKO

Location

Lisabon

ISBN

978-963-88410-0-1

Book

Proceedings of IMEKO 2009

Pages from–to

100–105

Pages count

6

BIBTEX


@inproceedings{BUT32157,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and David {Nečas},
  title="PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY",
  booktitle="Proceedings of IMEKO 2009",
  year="2009",
  month="September",
  pages="100--105",
  publisher="IMEKO",
  address="Lisabon",
  isbn="978-963-88410-0-1"
}