Publication detail

Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography

PREZIOSO, S. LUCIANI, D. TUCCERI, P. deMARCO, P. GAUDIERI, A. KAISER, J. SANTUCCI, S. OTTAVIANO, L. ZUPPELLA, P.

Czech title

Morfologie periodických nanostruktur vytvořených interferenční litografii využitím laseru emitujícího na vlnové délce 46,9 nm

English title

Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography

Type

conference paper

Language

en

Original abstract

Utilization of prototype low-cost tabletop soft X-ray laser (46.9 nm) as an Interference Nano-Litography tool is reported. The laser was developed in a frame of international cooperation at the University of LAquila, Italy. Interference Nano-Litography is one of the svereal applications this laser is used for.

Czech abstract

Příspěvek pojednává o měření morfologie periodických nanostruktur vytvořených interferenční litografii využitím laseru emitujícího na vlnové délce 46,9 nm. Stolní laser využívající kapilární výboje byl postaven v rámci mezinárodní spolupráce na Universite v LAquile.

English abstract

Utilization of prototype low-cost tabletop soft X-ray laser (46.9 nm) as an Interference Nano-Litography tool is reported. The laser was developed in a frame of international cooperation at the University of LAquila, Italy. Interference Nano-Litography is one of the svereal applications this laser is used for.

Keywords in English

nano-litography, soft X-ray laser, Ar+8, 46.9 nm

RIV year

2009

Released

01.09.2009

Publisher

Task Publishing

Location

Gdansk, Poland

ISBN

978-83-908112-7-7

Book

Joint Conferences on Advanced Materials, 6th Workshop on Functional and Nanostructured Materials, 10th Conference on Intermolecular and Magnetic Interactions in Matter

Edition number

1

Pages from–to

249–249

Pages count

1

BIBTEX


@inproceedings{BUT32646,
  author="Jozef {Kaiser},
  title="Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography",
  booktitle="Joint Conferences on Advanced Materials, 6th Workshop on Functional and Nanostructured Materials, 10th Conference on Intermolecular and Magnetic Interactions in Matter",
  year="2009",
  month="September",
  pages="249--249",
  publisher="Task Publishing",
  address="Gdansk, Poland",
  isbn="978-83-908112-7-7"
}