Publication detail

Control of defects and gettering in Czochralski silicon

ŠIK, J. LORENC, M. VÁLEK, L.

Czech title

Control of defects and gettering in Czochralski silicon

English title

Control of defects and gettering in Czochralski silicon

Type

conference paper

Language

en

Released

01.09.2004

ISBN

80-7345-032-1

BIBTEX


@inproceedings{BUT35644,
  author="Jan {Šik} and Michal {Lorenc} and Lukáš {Válek},
  title="Control of defects and gettering in Czochralski silicon",
  year="2004",
  month="September",
  isbn="80-7345-032-1"
}