Publication detail
Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry
OHLÍDAL, I. NEČAS, D. BURŠÍKOVÁ, V. FRANTA, D. OHLÍDAL, M.
Czech title
Optická charakterizace diamantu podobných uhlíkových tenkých vrstev neuniformních v tloušťce pomocí spektroskopické reflektometrie.
English title
Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry
Type
journal article in Web of Science
Language
en
Original abstract
Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity and illuminated light spot under the assumption that this non-uniformity is sufficiently slight. The second formula corresponds to the wedge-shaped non-uniformity of arbitrary magnitude within the circular light spot. It is shown that both the formulae are suitable for the successful optical characterization of non-uniform diamond-like carbon (DLC) thin films in contrast to the usually used reflectance formula for the uniform thin films. Within the optical characterization the values of the standard deviation of non-uniformity is determined together with the correct values of the mean thickness and material parameters corresponding to the dispersion model based on the parametrization of the density of electronic states. On the basis of the material parameters determined the correct spectral dependences of the optical constants of the DLC films studied are calculated
Czech abstract
Jsou prezentovány dva výrazy pro odrazivost neuniformních tenkých vrstev. První z nich odpovídá libovolnému tvaru této neuniformity a ozářené stopy povrchu za předpokladu, že tato neuniformita je dostatečně malá. Druhý výraz odpovídá klínovité nenuniformitě libovolné velikosti a kruhové světelné stopě. Je ukázáno, že oba výrazy jsou vhodné pro úspěšnou optickou charakterizaci diamantu podobných uhlíkových (DLC) tenkých vrstev na rozdíl od obvykle užívaných výrazů pro uniformní tenké vrstvy. V rámci tét optické charakterizace jsou určeny hodnoty standardní odchylky této neuniformity, střední tloušťky a materiálových parametrů, které odpovídají disperznímu modelu založenému na parametrizaci hustoty elektronových stavů. Z určených materiálových parametrů jsou vypočteny správné spektrální závislosti optických konstant studovaných DLC vrstev.
English abstract
Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity and illuminated light spot under the assumption that this non-uniformity is sufficiently slight. The second formula corresponds to the wedge-shaped non-uniformity of arbitrary magnitude within the circular light spot. It is shown that both the formulae are suitable for the successful optical characterization of non-uniform diamond-like carbon (DLC) thin films in contrast to the usually used reflectance formula for the uniform thin films. Within the optical characterization the values of the standard deviation of non-uniformity is determined together with the correct values of the mean thickness and material parameters corresponding to the dispersion model based on the parametrization of the density of electronic states. On the basis of the material parameters determined the correct spectral dependences of the optical constants of the DLC films studied are calculated
Keywords in Czech
Konstanty, disperze
Keywords in English
CONSTANTS; DISPERSION
RIV year
2008
Released
30.04.2008
Publisher
Elsevier
Location
Lausanne
ISSN
0925-9635
Journal
Diamond and Related Materials
Volume
17
Number
4,5
Pages from–to
709–712
Pages count
4
BIBTEX
@article{BUT42073,
author="Ivan {Ohlídal} and David {Nečas} and Vilma {Buršíková} and Daniel {Franta} and Miloslav {Ohlídal},
title="Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry",
journal="Diamond and Related Materials",
year="2008",
volume="17",
number="4,5",
month="April",
pages="709--712",
publisher="Elsevier",
address="Lausanne",
issn="0925-9635"
}