Publication detail
In situ analysis of PMPSi by spectroscopic ellipsometry and XPS
ČECHAL, J. TICHOPÁDEK, P. NEBOJSA, A. BONAVENTUROVÁ, O. URBÁNEK, M. SPOUSTA, J. NAVRÁTIL, K. ŠIKOLA, T.
Czech title
In-situ analýza PMPSi pomocí spektroskopické elipsometrie a XPS
English title
In situ analysis of PMPSi by spectroscopic ellipsometry and XPS
Type
journal article - other
Language
en
Original abstract
Paper deals with an in situ analysis of PMPSi by spectroscopic ellipsometry and XPS
Czech abstract
Článek se zabývá in-situ analýzou PMPSi pomocí spektroskopické elipsometrie a XPS
English abstract
Paper deals with an in situ analysis of PMPSi by spectroscopic ellipsometry and XPS
Keywords in English
PMPSi, optical degradation. spectroscopic ellipsometry, XPS
RIV year
2004
Released
01.01.2004
ISSN
0142-2421
Journal
Surface and Interface Analysis
Volume
38
Number
8
Pages count
4
BIBTEX
@article{BUT42361,
author="Jan {Čechal} and Petr {Tichopádek} and Alois {Nebojsa} and Olga {Bonaventurová} and Michal {Urbánek} and Jiří {Spousta} and Karel {Navrátil} and Tomáš {Šikola},
title="In situ analysis of PMPSi by spectroscopic ellipsometry and XPS",
journal="Surface and Interface Analysis",
year="2004",
volume="38",
number="8",
month="January",
issn="0142-2421"
}