Publication detail

In situ analysis of PMPSi by spectroscopic ellipsometry and XPS

ČECHAL, J. TICHOPÁDEK, P. NEBOJSA, A. BONAVENTUROVÁ, O. URBÁNEK, M. SPOUSTA, J. NAVRÁTIL, K. ŠIKOLA, T.

Czech title

In-situ analýza PMPSi pomocí spektroskopické elipsometrie a XPS

English title

In situ analysis of PMPSi by spectroscopic ellipsometry and XPS

Type

journal article - other

Language

en

Original abstract

Paper deals with an in situ analysis of PMPSi by spectroscopic ellipsometry and XPS

Czech abstract

Článek se zabývá in-situ analýzou PMPSi pomocí spektroskopické elipsometrie a XPS

English abstract

Paper deals with an in situ analysis of PMPSi by spectroscopic ellipsometry and XPS

Keywords in English

PMPSi, optical degradation. spectroscopic ellipsometry, XPS

RIV year

2004

Released

01.01.2004

ISSN

0142-2421

Journal

Surface and Interface Analysis

Volume

38

Number

8

Pages count

4

BIBTEX


@article{BUT42361,
  author="Jan {Čechal} and Petr {Tichopádek} and Alois {Nebojsa} and Olga {Bonaventurová} and Michal {Urbánek} and Jiří {Spousta} and Karel {Navrátil} and Tomáš {Šikola},
  title="In situ analysis of PMPSi by spectroscopic ellipsometry and XPS",
  journal="Surface and Interface Analysis",
  year="2004",
  volume="38",
  number="8",
  month="January",
  issn="0142-2421"
}