Publication detail
Instrument for thin film diagnostics by UV spectroscopic reflectometry
URBÁNEK, M. SPOUSTA, J. NAVRÁTIL, K. SZOTKOWSKI, R. CHMELÍK, R. BUČEK, M. ŠIKOLA, T.
Czech title
Zařízení pro diagnostiku tenkých vrstev pomocí UV spektroskopické reflektometrie
English title
Instrument for thin film diagnostics by UV spectroscopic reflectometry
Type
journal article - other
Language
en
Original abstract
Paper presents an instrument for thin film diagnostics by UV spectroscopic reflectometry
Czech abstract
Článek představuje zařízení pro diagnostiku tenkých vrstev pomocí UV spektroskopické reflektometrie
English abstract
Paper presents an instrument for thin film diagnostics by UV spectroscopic reflectometry
Keywords in English
reflectometry, thin films
RIV year
2004
Released
01.01.2004
ISSN
0142-2421
Journal
Surface and Interface Analysis
Volume
36
Number
8
Pages count
4
BIBTEX
@article{BUT42362,
author="Michal {Urbánek} and Jiří {Spousta} and Karel {Navrátil} and Robert {Szotkowski} and Radim {Chmelík} and Miroslav {Buček} and Tomáš {Šikola},
title="Instrument for thin film diagnostics by UV spectroscopic reflectometry",
journal="Surface and Interface Analysis",
year="2004",
volume="36",
number="8",
month="January",
issn="0142-2421"
}