Publication detail

In situ analysis of PMPSi thin films by spectroscopic ellipsometry

BRANDEJSOVÁ, E. ČECHAL, J. BONAVENTUROVÁ, O. NEBOJSA, A. TICHOPÁDEK, P. URBÁNEK, M. NAVRÁTIL, K. ŠIKOLA, T. HUMLÍČEK, J.

Czech title

In situ analýza tenkých vrstev PMPSi pomocí spektroskopické elipsometrie

English title

In situ analysis of PMPSi thin films by spectroscopic ellipsometry

Type

journal article - other

Language

en

Original abstract

Paper deals with an in situ analysis of PMPSi thin films by spectroscopic ellipsometry

Czech abstract

článek se zabývá in situ analýzou tenkých vrstev PMPSi pomocí spektroskopické elipsometrie

English abstract

Paper deals with an in situ analysis of PMPSi thin films by spectroscopic ellipsometry

Keywords in English

Ellipsometry, PMPSi, optical degradation

RIV year

2004

Released

01.01.2004

ISSN

0447-6441

Journal

Jemná mechanika a optika

Volume

9

Number

9

Pages count

3

BIBTEX


@article{BUT42364,
  author="Eva {Kolíbalová} and Jan {Čechal} and Olga {Bonaventurová} and Alois {Nebojsa} and Petr {Tichopádek} and Michal {Urbánek} and Karel {Navrátil} and Tomáš {Šikola} and Josef {Humlíček},
  title="In situ analysis of PMPSi thin films by spectroscopic ellipsometry",
  journal="Jemná mechanika a optika",
  year="2004",
  volume="9",
  number="9",
  month="January",
  issn="0447-6441"
}