Publication detail

Application of Complex UHV Apparaturus in a Study of Low-tepmerature Gallium-nitride Ultrathin Film Growth

VOBORNÝ, S. MACH, J. ČECHAL, J. KOSTELNÍK, P. TOMANEC, O. BÁBOR, P. SPOUSTA, J. ŠIKOLA, T.

Czech title

Aplikace komplexní UHV aparatury ke studiu nízkoteplotního růstu velmi tenkých vrstev nitridu gallia.

English title

Application of Complex UHV Apparaturus in a Study of Low-tepmerature Gallium-nitride Ultrathin Film Growth

Type

journal article - other

Language

en

Original abstract

Paper deals with the application of Complex UHV Apparaturus in a Study of Low-tepmerature Gallium-nitride Ultrathin Film Growth

Czech abstract

článek se zabývá aplikací komplexní UHV aparatury ke studiu nízkoteplotního růstu velmi tenkých vrstev nitridu gallia.

English abstract

Paper deals with the application of Complex UHV Apparaturus in a Study of Low-tepmerature Gallium-nitride Ultrathin Film Growth

Keywords in English

Ga, GaN, deposition, XPS

RIV year

2004

Released

01.01.2004

ISSN

0447-6441

Journal

Jemná mechanika a optika

Volume

9

Number

9

Pages count

5

BIBTEX


@article{BUT42366,
  author="Stanislav {Voborný} and Jindřich {Mach} and Jan {Čechal} and Petr {Kostelník} and Ondřej {Tomanec} and Petr {Bábor} and Jiří {Spousta} and Tomáš {Šikola},
  title="Application of Complex UHV Apparaturus in a Study of Low-tepmerature Gallium-nitride Ultrathin Film Growth",
  journal="Jemná mechanika a optika",
  year="2004",
  volume="9",
  number="9",
  month="January",
  issn="0447-6441"
}