Publication detail

Quantitative analysis of ultra thin layer growth by time-of-flight low energy ion scattering

PRIMETZHOFER, D. MARKIN, S. ZEPPENFELD, P. BAUER, P. PRŮŠA, S. KOLÍBAL, M. ŠIKOLA, T.

Czech title

Kvantitativní analýza růstu ultratenkých vrstev pomocí rozptylu nízkoenergetických iontů metodou time-of-flight

English title

Quantitative analysis of ultra thin layer growth by time-of-flight low energy ion scattering

Type

journal article - other

Language

en

Original abstract

Time of flight low energy ion scattering is used to quantitatively characterize the growth mode of Au deposited on B. Information on the filling factor (surface area coverage) is deduced from the yield of backscattered ions and the spectrum height of scattered neutrals. From the variation of the filling factor with the nominal Au thickness, cluster growth is deduced. Information on the average cluster height is obtained from the energy distribution of scattered neutrals and the comparison with computer simulation. Finally, an estimate of the aspect ratios is obtained for the clusters from the filling factor and the cluster height.

Czech abstract

Byla vyvinuta metoda kvantitativní analýzy růstu a morfologie (výška clusterů, zaplnění povrchu) ultratenkých vrstev zlata pomocí rozptylu nízkoenergetických iontů metodou time-of-flight.

English abstract

Time of flight low energy ion scattering is used to quantitatively characterize the growth mode of Au deposited on B. Information on the filling factor (surface area coverage) is deduced from the yield of backscattered ions and the spectrum height of scattered neutrals. From the variation of the filling factor with the nominal Au thickness, cluster growth is deduced. Information on the average cluster height is obtained from the energy distribution of scattered neutrals and the comparison with computer simulation. Finally, an estimate of the aspect ratios is obtained for the clusters from the filling factor and the cluster height.

Keywords in Czech

Rozptyl iontů, LEIS; Time-of-flight, ToF; Kvantitativní analýza

Keywords in English

Low energy ion scattering, LEIS; Time-of-flight, ToF; Quantitative analysis

RIV year

2008

Released

11.01.2008

ISSN

0003-6951

Journal

Applied Physics Letters

Volume

92

Number

1

Pages from–to

011929-1–011929-3

Pages count

3

BIBTEX


@article{BUT43927,
  author="Daniel {Primetzhofer} and S. N. {Markin} and Peter {Zeppenfeld} and P. {Bauer} and Peter {Bauer} and Stanislav {Průša} and Miroslav {Kolíbal} and Tomáš {Šikola},
  title="Quantitative analysis of ultra thin layer growth by time-of-flight low energy ion scattering",
  journal="Applied Physics Letters",
  year="2008",
  volume="92",
  number="1",
  month="January",
  pages="011929-1--011929-3",
  issn="0003-6951"
}