Publication detail

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. NEČAS, D. BURŠÍKOVÁ, V.

Czech title

Aplikace spektroskopické zobrazovací reflektometrie pro analýzu plošně neuniformních diamantu podobných uhlíkových vrstev

English title

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

Type

journal article in Web of Science

Language

en

Original abstract

Complete optical characterization of diamond-like carbon films non-uniform in thickness is performed usig spectroscopic imaging reflectometry. It is shown that by using this technique it is possible to determine the distributions of the refractive index, extinction coefficient and thickness (with arbitrary shape of the thickness non-uniformity) of these films.

Czech abstract

Pomocí spektroskopické zobrazovací reflektometrie je provedena úplná optická charakterizace diamantu podobných vrstev, které jsou neuniformní v tloušťce. Je ukázáno, že touto technikou lze určit rozdělení indexu lomu, extinkčního koeficientu a tloušťky (pro obecný tvar neuniformity v tloušťce) daných vrstev.

English abstract

Complete optical characterization of diamond-like carbon films non-uniform in thickness is performed usig spectroscopic imaging reflectometry. It is shown that by using this technique it is possible to determine the distributions of the refractive index, extinction coefficient and thickness (with arbitrary shape of the thickness non-uniformity) of these films.

Keywords in Czech

spektroskopická zobrazovací reflektometrie, diamantu podobné uhlíkové vrstvy, optická analýza

Keywords in English

spectroscopic imaging reflectometry, diamond-like carbon films, optical analysis

RIV year

2009

Released

31.01.2009

Publisher

Elsevier

Location

LAUSANNE

ISSN

0925-9635

Journal

Diamond and Related Materials

Volume

2009 (18)

Number

1

Pages from–to

384–387

Pages count

4

BIBTEX


@article{BUT48065,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and David {Nečas} and Vilma {Buršíková},
  title="Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films",
  journal="Diamond and Related Materials",
  year="2009",
  volume="2009 (18)",
  number="1",
  month="January",
  pages="384--387",
  publisher="Elsevier",
  address="LAUSANNE",
  issn="0925-9635"
}