Publication detail

A new program for the design of electron microscopes

LENCOVÁ, B. ZLÁMAL, J.

Czech title

Nový program pro návrh elektronových mikroskopů

English title

A new program for the design of electron microscopes

Type

journal article - other

Language

en

Original abstract

The paper describes the basic features of a new program EOD (Electron Optical Design), primarily intended for the design of systems of electron lenses and deflectors for scanning and transmission electron microscopes. A very accurate first-order finiteelement method in graded topologically regular meshes provides the fields. Electron optical properties can be analyzed from standard paraxial trajectories and aberration integrals for combined lens and deflection systems or, for a general system, from the results of very accurate ray-tracing. The advantage of EOD is that it includes a user-friendly interface, simplifying the output of results and the whole design procedure. EOD is used by undergraduate and postgraduate students at ISI and TU Brno.

Czech abstract

Článek popisuje nový program pro návrh elektronových mikroskopů EOD (Electron Optical Design), který slouží k návrhu elektrových čoček a deflektorů pro rastrovací elektronové mikroskopy.

English abstract

The paper describes the basic features of a new program EOD (Electron Optical Design), primarily intended for the design of systems of electron lenses and deflectors for scanning and transmission electron microscopes. A very accurate first-order finiteelement method in graded topologically regular meshes provides the fields. Electron optical properties can be analyzed from standard paraxial trajectories and aberration integrals for combined lens and deflection systems or, for a general system, from the results of very accurate ray-tracing. The advantage of EOD is that it includes a user-friendly interface, simplifying the output of results and the whole design procedure. EOD is used by undergraduate and postgraduate students at ISI and TU Brno.

Keywords in Czech

Metoda konečných prvků; elektronové čočky a deflektory; počítačově podporovaný návrh; uživatelské rozhraní

Keywords in English

Finite element method; Electron lenses and deflectors; Computer-aided design; User interface

RIV year

2008

Released

29.08.2008

Publisher

Elsevier

ISSN

1875-3892

Journal

Physics Procedia

Volume

1

Number

1

Pages from–to

315–324

Pages count

10

BIBTEX


@article{BUT48562,
  author="Bohumila {Lencová} and Jakub {Zlámal},
  title="A new program for the design of electron microscopes",
  journal="Physics Procedia",
  year="2008",
  volume="1",
  number="1",
  month="August",
  pages="315--324",
  publisher="Elsevier",
  issn="1875-3892"
}