Publication detail

Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. FRANTA, D.

Czech title

Aplikace zobrazovací spoktroskopické reflektometrie k analýze plošné neuniformity diamantu podobných uhlíkových vrstev

English title

Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films

Type

abstract

Language

en

Original abstract

An novel efficient method enabling us to perform the complete optical analysis of diamond-like carbon thin films exhibiting area non-uniformity in optical parameters is presented.

Czech abstract

Je presentována nová účinná metoda umožňující kompletní optickou analýzu diamantu podobných uhlíkových vrstev vykazujících plošnou neuniformitu v optických parametrech

English abstract

An novel efficient method enabling us to perform the complete optical analysis of diamond-like carbon thin films exhibiting area non-uniformity in optical parameters is presented.

Keywords in Czech

Optické přístroje, DLC vrstvy, optická neuniformita

Keywords in English

Optical instrumentation, DLC films, optical non-uniformity

Released

26.05.2008

Publisher

Academia Sinica, Taiwan

Location

Taipei

Pages from–to

422–422

Pages count

1