Publication detail
Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films
OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. FRANTA, D.
Czech title
Aplikace zobrazovací spoktroskopické reflektometrie k analýze plošné neuniformity diamantu podobných uhlíkových vrstev
English title
Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films
Type
abstract
Language
en
Original abstract
An novel efficient method enabling us to perform the complete optical analysis of diamond-like carbon thin films exhibiting area non-uniformity in optical parameters is presented.
Czech abstract
Je presentována nová účinná metoda umožňující kompletní optickou analýzu diamantu podobných uhlíkových vrstev vykazujících plošnou neuniformitu v optických parametrech
English abstract
An novel efficient method enabling us to perform the complete optical analysis of diamond-like carbon thin films exhibiting area non-uniformity in optical parameters is presented.
Keywords in Czech
Optické přístroje, DLC vrstvy, optická neuniformita
Keywords in English
Optical instrumentation, DLC films, optical non-uniformity
Released
26.05.2008
Publisher
Academia Sinica, Taiwan
Location
Taipei
Pages from–to
422–422
Pages count
1