Publication detail

Diagnostics and optimization of ion source parameters

VOBORNÝ, S. ŠIKOLA, T. PRŮŠA, S. ZLÁMAL, J. BÁBOR, P.

Czech title

Diagnostika a optimalizace paametrů iontového zdroje.

English title

Diagnostics and optimization of ion source parameters

Type

conference paper

Language

en

Original abstract

This contribution deals with diagnostics and consequent optimization of plasmatic ion source. Ion-beam current density and ion current loss measurements are determined with the attempt of improving ion-beam transportation characteristics.

Czech abstract

Příspěvek se zabývá diagnostikou a následnou optimalizací iontového zdroje.

English abstract

This contribution deals with diagnostics and consequent optimization of plasmatic ion source. Ion-beam current density and ion current loss measurements are determined with the attempt of improving ion-beam transportation characteristics.

Keywords in English

ion source, optimization, thin film deposition

RIV year

2002

Released

15.11.2001

Publisher

FEI VUT v Brně

Location

Brno

ISBN

80-214-1992-X

Book

Sborník příspěvků konference Nové trendy ve fyzice

Pages count

6

BIBTEX


@inproceedings{BUT6510,
  author="Stanislav {Voborný} and Tomáš {Šikola} and Stanislav {Průša} and Jakub {Zlámal} and Petr {Bábor},
  title="Diagnostics and optimization of ion source parameters",
  booktitle="Sborník příspěvků konference Nové trendy ve fyzice",
  year="2001",
  month="November",
  publisher="FEI VUT v Brně",
  address="Brno",
  isbn="80-214-1992-X"
}