Detail publikace
Optical characterization of thin films non-uniform in thickness by a multiple-wavelength reflectance method
OHLÍDAL, M. OHLÍDAL, I. FRANTA, D. KRÁLÍK, T. JÁKL, M. ELIÁŠ, M.
Anglický název
Optical characterization of thin films non-uniform in thickness by a multiple-wavelength reflectance method
Typ
článek v časopise - ostatní, Jost
Jazyk
en
Originální abstrakt
An original method enabling us to characterize the non-uniformity of thin-film thickness is decribed. This method employs the interpretation of data obtained by multiple-wavelength reflectometry. The values of the reflectance are measured for several wavelengths in many points lying along the area of the film. The spectral dependence of the refractive index of the material forming the film is determined using variable-angle spectroscopic ellipsometry.
Anglický abstrakt
An original method enabling us to characterize the non-uniformity of thin-film thickness is decribed. This method employs the interpretation of data obtained by multiple-wavelength reflectometry. The values of the reflectance are measured for several wavelengths in many points lying along the area of the film. The spectral dependence of the refractive index of the material forming the film is determined using variable-angle spectroscopic ellipsometry.
Klíčová slova anglicky
non-uniform thin films, optical characterization
Rok RIV
2002
Vydáno
01.08.2002
ISSN
0142-2421
Časopis
Surface and Interface Analysis
Ročník
34
Číslo
1
Počet stran
4
BIBTEX
@article{BUT40936,
author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Daniel {Franta} and Tomáš {Králík} and Miloš {Jákl} and Marek {Eliáš},
title="Optical characterization of thin films non-uniform in thickness by a multiple-wavelength reflectance method",
journal="Surface and Interface Analysis",
year="2002",
volume="34",
number="1",
month="August",
issn="0142-2421"
}