Vliv fyzikálních vlastností a chemického složení vzorku na vznik aerosolu při 213 nm laserové ablaci

Influence of physical properties and chemical composition of sample on formation of aerosol particles generated by nanosecond laser ablation at 213 nm

článek v časopise - ostatní, Jost

en

The influence of sample properties and composition on the size and concentration of aerosol particles generated by nanosecond Nd:YAG laser ablation at 213 nm was investigated for three sets of different materials, each containing five specimens with a similar matrix (Co-cemented carbides with a variable content of W and Co, steel samples with minor differences in elemental content and silica glasses with various colors). The concentration of ablated particles (particle number concentration, PNC) was measured in two size ranges (10 to 250 nm and 0.25 to 17 micro m) using an optical aerosol spectrometer. The shapes and volumes of the ablation craters were obtained by Scanning Electron Microscopy (SEM) and by an optical profilometer, respectively. Additionally, the structure of the laser-generated particles was studied after their collection on a filter using SEM.

Vliv vlastností (fyzikálních a chemických) zkoumaného vzorku na koncentraci a velikost částic tvořících aerosol při laserové ablaci s Nd:YAG laserem o vlnové délce 213 nm je předmětem tohoto článku. Jsou srovnány vlastnosti třech různých pevných vzorků (wolframkarbid, ocel, sklo).

The influence of sample properties and composition on the size and concentration of aerosol particles generated by nanosecond Nd:YAG laser ablation at 213 nm was investigated for three sets of different materials, each containing five specimens with a similar matrix (Co-cemented carbides with a variable content of W and Co, steel samples with minor differences in elemental content and silica glasses with various colors). The concentration of ablated particles (particle number concentration, PNC) was measured in two size ranges (10 to 250 nm and 0.25 to 17 micro m) using an optical aerosol spectrometer. The shapes and volumes of the ablation craters were obtained by Scanning Electron Microscopy (SEM) and by an optical profilometer, respectively. Additionally, the structure of the laser-generated particles was studied after their collection on a filter using SEM.

213 nm laser ablation; Sample properties; Aerosol particles; Composition

2010

14.11.2009

0584-8547

Spectrochimica Acta Part B

65

1

51–60

10