Detail publikace
New method for the complete analysis of thin films non-uniform in optical parameters
OHLÍDAL, M. OHLÍDAL, I. FRANTA, D. ČUDEK, V.
Anglický název
New method for the complete analysis of thin films non-uniform in optical parameters
Typ
abstrakt
Jazyk
en
Originální abstrakt
New method enabling us to perform the complete optical analysis of non-absorbing and weakly absorbing thin films non-uniform in thickness and optical constants is presented. This method is based on interpreting the spectral dependences of the reflectance measured for a sufficient number of points forming a matrix in the mean planes of the boundaries of the film analyzed.
Anglický abstrakt
New method enabling us to perform the complete optical analysis of non-absorbing and weakly absorbing thin films non-uniform in thickness and optical constants is presented. This method is based on interpreting the spectral dependences of the reflectance measured for a sufficient number of points forming a matrix in the mean planes of the boundaries of the film analyzed.
Klíčová slova anglicky
Thin films, spectral reflectance
Vydáno
01.10.2002
Nakladatel
The University of Tokyo, JApan
Místo
Tokyo
Kniha
Asia-Pacific Surface & Interface Analysis Conference
Počet stran
1